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Boron nitride Components for Semiconductor Equipment

  • Boron nitride Components for Semiconductor Equipment
  • Boron nitride Components for Semiconductor Equipment
  • Boron nitride Components for Semiconductor Equipment
  • Boron nitride Components for Semiconductor Equipment
  • Boron nitride Components for Semiconductor Equipment
  • Boron nitride Components for Semiconductor Equipment
Boron nitride Components for Semiconductor Equipment
  • MSJ/BN-013
  • boron nitride ceramic
  • customized
  • 5 pcs per type
  • Semiconductor Equipment

The hot-pressed boron nitride produced by Mascera is an advanced ceramic material formed by high-temperature pressing and sintering of hexagonal boron nitride powder. It is highly suitable for the production of various shielding and insulation components used in harsh high-temperature environments, such as physical vapor deposition (PVD), chemical vapor deposition (CVD), and plasma.

Any inquiry please email info@mascera-tec.com or call +86 13860446139

Product detail

Boron nitride Components

The hot-pressed boron nitride produced by Mascera is an advanced ceramic material formed by high-temperature pressing and sintering of hexagonal boron nitride powder. It is a dense and easily machinable material that exhibits properties such as high temperature resistance, low thermal expansion coefficient, low friction coefficient, excellent dielectric strength and insulation. These characteristics make it highly suitable for various shielding and insulation components in harsh high-temperature environments, such as physical vapor deposition (PVD), chemical vapor deposition (CVD), and plasma. These components, including insulation shrouds and rails, target frames, protective tubes, shields, and liners, ensure that the PVD arc remains confined to the target area, preventing equipment damage.


Main properties

  • Low density

  • High electrical resistivity

  • High thermal conductivity

  • High working temperature

  • Good Machinability

  • Low thermal expansion coeffient

  • Good thermal shock resistance 

  • Good corrosion resistance

  • Non-wetting with metals

  • High breakdown voltage resistance

Boron nitride ceramic

Material Data Sheet

Material TypeBN-997
BN-99BN-ABN-BBN-CBN-DBN-E

Main Content

BN>99.7%

BN>99%

BN+AL+SI

BN+ZR+AL

BN+SIC

BN+ZRO2

BN+AlN

Color

White

White

Light Grey

Light Grey

Grey Green

Dark Grey

Grey Green

Density (g/cm3)

1.6

1.95-2.0

2.2-2.3

2.25-2.35

2.4-2.5

2.8-2.9

2.8-2.9

Flexural Strength (Mpa)

18

30

65

65

80

90

90

Compressive Strength (Mpa)

45

85

145

145

175

220

220

Electrical Resistivity (Ω.Cm)

>1014

>1014

>1013

>1013

>1012

>1012

>1013

Max. Service Temp. (℃) 

@Air Condition

900

900

900

900

900

900

900

Max. Service Temp. (℃) @Vacuum Condition

1800

1800

1750

1750

1800

1800

1750

Max. Service Temp. (℃) 

@Inert Gas Condition

2100

2100

1750

1750

1800

1800

1750

Thermal Conductivity (W/Mk)

35

40

35

35

45

30

85

Thermal Expansion Coefficient (25 - 1000℃) (10-6/K)

1.5

1.8

2.0

2.0

2.8

3.5

2.8


Tips for Using

1.Working temperature in the air should not exceed 900℃, oxidation will occur when more than 900°C.

2.The components shall be stored in the dry environment inside a sealed container.

3.Never wash the component with water. Use fine sandpaper or cloth to remove any dirts or residues.


Packing & Shipment

Package typecarton box with foam protection
Payment terms

TT / Western Union / Paypal

50% payment in advanced and 50% before shipment

Loading port Xiamen, China
Shipping wayBy sea / air / door-to-door express

Hot pressed boron nitride

Boron nitride Components


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